JPH01157427U - - Google Patents
Info
- Publication number
- JPH01157427U JPH01157427U JP4802088U JP4802088U JPH01157427U JP H01157427 U JPH01157427 U JP H01157427U JP 4802088 U JP4802088 U JP 4802088U JP 4802088 U JP4802088 U JP 4802088U JP H01157427 U JPH01157427 U JP H01157427U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- area
- line
- edge
- deviation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4802088U JPH01157427U (en]) | 1988-04-08 | 1988-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4802088U JPH01157427U (en]) | 1988-04-08 | 1988-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157427U true JPH01157427U (en]) | 1989-10-30 |
Family
ID=31274193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4802088U Pending JPH01157427U (en]) | 1988-04-08 | 1988-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157427U (en]) |
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1988
- 1988-04-08 JP JP4802088U patent/JPH01157427U/ja active Pending